www.sensirion.com version 0. 5 C december 2015 1 / 8 preliminary data sheet C sfm3200 - aw digital flow meter for medical applications ? low pressure drop ? expiratory flow sensor ? flow range: - 100 slm to + 250 slm (bi - directional) ? superior performance at low flows ? autoclavable & cleanable product summar y the sfm3200 - aw sensor is sensirions digital flow meter designed fo r medical applications . it measure s the flow rate of air , oxygen and other non - aggressive gases with superb accuracy. a special design of the flow channel results in a very low pressure drop through the flow body of the sensor . combined with its ability to withstand autoclave procedures , the sfm3200 - aw is extremely suited to exp iratory flow measurements in medical ventilation and other respiratory applications. the sfm3200 has been designed with the medical professionals in mind. it features medical cones for pneumatic connection to standard breathing circuits and a mechanical in terface for an easy and reliable electrical re connection . the sensor element , signal processing and digital calibration are on a single microchip assuring very fast signal processing time , best - i n - class accuracy and superior robustness to rough handling and adverse conditions . the well - proven and patented cmosens ? sensor technology is perfectly suited for high - quality mass production and is the ideal choice for demanding and cost - sensitive oem applications . applications ? ventilation ? an esthesia ? respiratory measurements ? expiratory flow measurement ? metabolic measurements oem options a variety of custom options can be implemented for high - volume oem applications (custom flow rates, calibration for other gases, different body form factor etc.). contact us for more information. sensor chip the sfm3200 flow meter features a fifth - gen eration silicon sensor chip . in addition to a thermal mass flow sensor element, the chip contains an amplifier, a/d converter, eeprom memory, digital signal processing circuitry, and interface. due to seamless integrati on of signal acquisition and processing on the single silicon die significant performance and cost benefits are achieved.
www.sensirion.com version 0. 5 C december 2015 2 / 8 1. sensor performanc e 1.1 physical specifications 1 parameter condition value unit flow range - 10 0 +250 2 typ . 3 max 4 accuracy 5 s pan ( - 40 to +80) slm s pan ( - 60 to +100) slm s pan full range o ffset 2 3 7 0.05 3 5 10 0. 1 % m.v. 6 slm 2 noise level 7 s pan < 5 0 slm s pan > 5 0 slm s pan > 100slm offset 0.6 1 .0 2 0.034 1. 0 2 . 0 4.5 0.0 7 % m.v 6 % m.v 6 s lm 2 accuracy shift due to temperature variation 5 , 8 span offset 0.4 0.015 0.5 0.02 % m.v./10?c /10?c 6 slm 2 pressure drop @ 60 slm @ 100 slm @ 200 slm 100 / 0.41 250 / 0.81 7 50 / 3.02 150 / 0.62 300 / 0.97 110 0 / 4.44 pa / inh 2 o 1.2 ambient conditions parameter condition value unit calibrated temperature range t(environment)=t(gas) 15% rel. hum. +10 +50 +50 25 +65 C 1 unless otherwise noted, all sensor specifications are valid at 25c with vdd = 5v a nd absolute pressure = 966 mbar and horizontal flow. 2 slm: mass flow measured in liters per minute at standard conditions ( t = 20 c, p = 1013.25 mbar ) 3 for "typ" a cpk of 0.67 is targeted ( 95% of sensors within the typ limit ) 4 for "max" no sensor measure d outside of this limits will be shipped and a cpk of 1.33 is targeted 5 total accuracy/repeatability is a sum of zero - point and span accuracy/repeatability. 6 %m.v. = % measured value = % of reading 7 noise level defined as standard deviation of individua l sensor readings, measured at full sampling rate (typ: average of noise level ; max: at least 99.99% of sensors have a noise level below indicated value) 8 these effects need to be added to the initial values if applicable
www.sensirion.com version 0. 5 C december 2015 3 / 8 1.3 media compatibility parameter value calibration 9 air media c ompatibility air, n 2 , o 2 , other non - aggressive gases wetted m aterials si, si 3 n 4 , sio x , gold, epoxy, glob top, pps u , silicone rohs, reach rohs and reach compliant the sensor can be used with gas mixtures, such as breath gas with typically 4 % co 2 and 100% high humidity . p lease ask sensirion for details and error estimates. 2. electrical specifications 2.1 electrical characteristics electrical properties condition value unit interface i 2 c default sensor address 64 (h4 0) update time 14 bit 0.5 ms soft r eset t ime 80 ms start - up time 10 max. 100 m s supply voltage 5v +/ - 5% v communication level high low min max 2.5 gnd vdd 1.1 v power c onsumption < 5 0 mw electrical connector see section 2.2 and 3.2 external heater power rating max. 0.5 w external heater resistance typ. 51 ? 32 20000 9 contact sensirion for information about other gases, wider calibrated temperature ranges and higher storage temperatures. 10 after 4.75v is reached 2.2 pin layout 2.3 conversion to physical values in order to obtain the measured flow /temperature in [slm]/[c], the measured value needs to be converted using the following formula: ???? [ ??? ] = ???????? ????? ? ?????? ???? ????? ?????? ???? please note that the first measurement performed directly after chip initialization is not valid.
www.sensirion.com version 0. 5 C december 2015 4 / 8 3. mechanical specifications 3.1 connection with medical cones fitting s of the sfm3200 sensor correspond to the international standard iso5356 - 1 :2004 . details about this type of connection can be found in the description of the standard. 3.2 mechanical/electrical interface sfm3200 - aw has been designed for use in an expiratory environment. therefore the sensor has been designed for a connector that can be easily connected and disconnected. the connector itself is not provided by sensirion as a standard product but sensirion can help with design recommendations. 3.1 dimensions parameter value unit length 73.0 mm inner diameter 19 mm downstream conical cone 11 22 mm upstream conical socket 9 22 mm weight <30 g all dimensions are in millimet r es (mm). 11 according to iso5356 - 1:2004
www.sensirion.com version 0. 5 C december 2015 5 / 8 4. instructions for use 4.1 calibration orientation the sensors are calibrated horizontally as depicted in the following graph: 4.2 inlet flow condition s in order to provide good flow conditions, the inner diameter of the connecting tube has to be approximately the same as the inner diameter of the sfm32 00 main flow channel. the inlet tube has to be straight and at least 10 cm in length. the sfm3 2 00 is equipped with meshes on the in - and out lets of the flow channel to reduce turbulences and thus improve the stab ility . please refer to the application note inlet conditions for the sfm3000 mass flow meters for more information. 4.3 temperature compensation the sfm3200 sensor features digital temperature compensation. the temperature is measured on the cmosens ? chip by an on - chip temperature sensor. this data is fed to a compensation circuit that is also integrated on the cmosens ? sensor chip. thus, n o external temperature compensation is necessary. 4.4 sensor handling the sfm3200 sensor is designed to be robust and shock resistant. nevertheless, the accuracy of the high - precision sfm3200 can be degraded by rough handling. sensirion does not guarantee proper operation in case of improper handling. note: never connect t he sensor while connecting part is wet. especially after cleaning specially care is needed to dry the sensor. please be aware that he sfm3200 has been designed for usage with air and other non - corrosive and toxic gases . for the above reasons, sensirion g uarantees the safe use of the cmosens? mass flow meter for inert, in - explosive and non - toxic gases only. the s fm3200 sensor is designed to be robust and shock resistant. nevertheless, the accuracy of the high - precision sfm320 0 can be degraded by rough han dling. sensirion does not guarantee proper operation in case of improper handling. note: avoid applying mechanical stress. 4.5 cleaning (sfm3 200 - aw version) the sfm3200 - aw has been designed to withsta nd medical cleaning procedures. for details of the cleaning tests performed please contact sensirion. sensirion ag does not guarantee the stability of the flow sensor using arbitrary methods and/or equipment for autoclaving. validation of the flow sensor stability for a specific type of procedure and/or equipment is the sole responsibility of the customer. 4.6 esd the electronics of the sfm3 2 00 - aw fl ow sensor chip has been tested for esd and passed an 8kv contact test. 4.7 i 2 c interface and communication due to i 2 c interface restrictions, the cable length from the sensor to the microprocessor is recommended to be as short as possible and certainly not above 30 cm. for wire s longer than 10 cm it is mandatory to shield the sda and scl. in case data is read from the sensor, the first data byte of the transaction must always be acknowledged by the master. it must be possible to reset the sensor through a hard reset, i.e. power ing off and on the sensor, in case the sensor freezes. i 2 c communication details are given in the application note gf_an_sfm3xxx_i 2 c functional description . 5. ordering information use the part names and product numbers shown in the table below when ordering sfm3200 sensors. for the latest product information and local distributors, visit www.sensirion.com . flow
www.sensirion.com version 0. 5 C december 2015 6 / 8 part name product number sfm3 200 - aw 1 - 101050 - 01 packaging units: 3 0 items/tray. every sensor is traceable by a unique serial number.
www.sensirion.com version 0. 5 C december 2015 7 / 8 6. disclaimer this is a preliminary datasheet. all parameters are based on our best knowledge and understanding. these values are subject to change as the development and qualification of the s ensor progresses. therefore these values may differ from those of the final product. please contact sensirion regarding any questions you have. please treat all information contained herein strictly confidential. r evision history date author version changes march 2014 dat 0.2 first release nov 2014 dat 0.31 preliminary datasheet release may 2015 dat 0. 4 update after first qualification tests ; released preliminary version december 2015 dat 0.5 changed status to d1
www.sensirion.com version 0. 5 C december 2015 8 / 8 important notices warning, personal injury do not use this product as safety or emergency stop devices or in any other application where failure of the product could result in personal injury (including death). do not use this product for applications other than its intended and authorized use. before installing, handling, using or servicing this product, please consult the datasheet and application notes . failure to comply with these instructions could result in death or serious injury. if the buyer shall purchase or use sensirion products for any unintended or unauthorized application, buyer shall defend, indemnify and hold harmless sensirion and its off icers, employees, subsidiaries, affiliates and distributors against all claims, costs, damages and expenses, and reasonable attorney fees arising out of, directly or indirectly, any claim of personal injury or death associated with such unintended or unaut horized use, even if sensirion shall be allegedly negligent with respect to the design or the manufacture of the product. esd precautions the inherent design of this component causes it to be sensitive to electrostatic discharge (esd). to prevent esd - induc ed damage and/or degradation, take customary and statutory esd precautions when handling this product. see application note handling instructions for more information. warranty sensirion warrants solely to the original purchaser of this product for a per iod of 12 months (one year) from the date of delivery that this product shall be of the quality, material and workmanship defined in sensirions published specifications of the product. within such period, if proven to be defective, sensirion shall repair and/or replace this product, in sensirions discretion, free of charge to the buyer, provided that: ? notice in writing describing the defects shall be given to sensirion within fourteen (14) days after their appearance; ? such defects shall be found, to sens irions reasonable satisfaction, to have arisen from sensirions faulty design, material, or workmanship; ? the defective product shall be returned to sensirions factory at the buyers expense; and ? the warranty period for any repaired or replaced product s hall be limited to the unexpired portion of the original period. this warranty does not apply to any equipment which has not been installed and used within the specifications recommended by sensirion for the intended and proper use of the equipment. except for the warranties expressly set forth herein, sensirion makes no warranties, either express or implied, with respect to the product. any and all warranties, including without limitation, warranties of merchantability or fitness for a particular purpose, are expressly excluded and declined. sensirion is only liable for defects of this product arising under the conditions of operation provided for in the datasheet and proper use of the goods. sensirion explicitly disclaims all warranties, express or implied, for any period during which the goods are operated or stored not in accordance with the technical specifications. sensirion does not assume any liability arising out of any application or use of any product or circuit and specifically disclaims an y and all liability, including without limitation consequential or incidental damages. all operating parameters, including without limitation recommended parameters, must be validated for each customers applications by customers technical experts. recomm ended parameters can and do vary in different applications. sensirion reserves the right, without further notice, (i) to change the product specifications and/or the information in this document and (ii) to improve reliability, functions and design of this product. copyright ? 2001 - 2015 , sensirion. cmosens ? is a trademark of sensirion all rights reserved headquarters and subsidiaries sensirion ag laubisruetistr. 50 ch - 8712 staefa zh switzerland phone: +41 44 306 40 00 fax: +41 44 306 40 30 info@sensirion.com www.sensirion.com sensirion inc., usa phone: +1 805 409 4900 info_us@sensirion.com www.sensirion.com sensirion japan co. ltd. phone: +81 3 3444 4940 info@sensirion.co.jp www.sensirion.co. jp sensirion korea co. ltd. phone: +82 31 345 0031 3 info@sensirion.co.kr www.sensirion.co.kr sensirion china co. ltd. phone: +86 755 8252 1501 info@sensirion.com.cn www.sensirion.com .cn sensirion ag (germany) phone: +41 44 927 11 66 info@sensirion.com www.sensirion.com to find your local representative, please visit www.sensirion.com/contact
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